The semiconductor industry directly emits PFCs from its plasma etching and chemical vapor deposition (CVD) operations. In 2005, the industry's PFC emissions were equivalent to 4.3 million metric tons of CO2 (Inventory of U.S. Greenhouse Gas Emissions and Sinks: 1990-2005, U.S. EPA, 2007). Since forming a voluntary partnership with EPA in 1999, the U.S. semiconductor industry has dramatically improved its PFC emissions intensity - reducing it by 41%.
U.S. Semiconductor Industry Aggregate PFC Emissions
Source: EPA, 2007; EPA, 2006
Page Last Modified: August 7, 2008